Basic Study on Design and Simulation of Mems Switches Using Advanced Design Systems

نویسنده

  • E. Thendral
چکیده

This paper signifies a very basic design and simulation techniques of RF MEMS switches using the advanced design systems software tool (ADS).Micro electro mechanical systems are recent development technologies which has better characteristics performance and also operating at microwave range of frequencies. Fundamentally MEMS switches can be categorized into two types series switches (ohmic type) and shunt switches (capacitive type). Then four types of actuation mechanisms are used to operate the switch. Here the switches are driven by electrostatic actuation method. The design difference between the switches in their ON and OFF state is air gap value. The design of switch OFF state i.e. downstate was reduced 1/3 of air gap value in its ON state design. A basic switching operation of ON state & OFF state are obtained and the s-parameters are used to examine the results of switching performance which includes insertion loss and return loss. KeywordsRF MEMS, CPW, Series, Shunt, Electrostatic Force, Insertion Loss and Return Loss

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تاریخ انتشار 2015